Induced magnetic‐field effects in inductively coupled plasmas
نویسندگان
چکیده
منابع مشابه
Nonlinear effects in inductively coupled plasmas
Nonlinear effects in an inductive discharge have been studied experimentally and theoretically in a low pressure and low frequency operational regime. Plasma dynamics at these conditions is strongly nonlinear due to inertial and Lorentz forces. Nonlinear plasma polarization at the second harmonic and mean ~ponderomotive! potential as well as generation of the electric current at the second harm...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 1996
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.871979